MOSCOW BAUMANN STATE TECHNICAL UNIVERSITY
DEMO VERSION!!!

INTERNET LABORATORY "PLASMA SPECTROMETRY AND PLASMA NANOTECHNOLOGIES"

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EQUIPMENT

   Spectrometer

   Optical behch design

   Optical resolution

   CCD-detector

   Microprocessor board

   Fibre optic cable

   Collimating lens

   Objects of research

   AVALight lamp

   Halogen and deuterium lamps

SPECTROMETER CONTROL PARAMETERS

   Optical channels

   Smoothing

   Integration time

   Average

   Correct for dynamic dark

   Saturation detection levels

TRAININGS

   Technics and practice of spectrofotometry

   The qualitative analysis of radiation spectrum

   Definition of the Electronic Temperature in Plasma

PLASMA NANOTECHNOLOGIES

   Plasma facility for nanotechnologies

   Experiment scheme

   Plasma spatial scanning

   Working gas mixture pressure and composition control

   Control interface
 
Plasma spatial scanning
The spatial distribution of plasma parameters is extremely important for the coating process. To map the spatial distribution, the remote plasma spectrum diagnostic system has been created, which is controlled by a remote experimenter.

The radiation from discharge local areas of the MSS is collected by the optical head connected with optical fiber and moving along the discharge axis. The discharge spatial scanning is performed by the radiation collection system, which moves with the help of a step motor. The control signal is formed by a software program through the digital channels of the adapter module, and provides optical head positioning with high accuracy.

The software interface for the remote control of the step motor is implemented in the LabVIEW environment.