The spatial distribution of plasma parameters is extremely important for the coating process. To map the spatial distribution, the remote plasma spectrum diagnostic system has been created, which is controlled by a remote experimenter.
The radiation from discharge local areas of the MSS is collected by the optical head connected with optical fiber and moving along the discharge axis. The discharge spatial scanning is performed by the radiation collection system, which moves with the help of a step motor. The control signal is formed by a software program through the digital channels of the adapter module, and provides optical head positioning with high accuracy.
The software interface for the remote control of the step motor is implemented in the LabVIEW environment.