Working gas mixture pressure and composition control |
To control the gas pressure there is an automatic control system in the discharge vacuum chamber. The system operates in the pressure range (0,01 - 5) Pa. The pressure in the vacuum chamber is measured by a thermocouple gage head consisting of a heater and a thermocouple; the thermocouple leads are connected with the amplifier. The amplified signal is fed to the ADC of the USB-NI6259 module. The consumption of working gases is controlled by two gas control devices. The function elements are controlled by a signal via DAC. Using two control devices makes it possible to get the working gas mixture with a given volume/mass ratio. The control software for gas-vacuum system has been created in the LabVIEW environment.
The experimenter has the possibility either to control pressure manually by setting the consumption of working gas, or to use the automatic regulator and set the pressure value which is to be stabilized. The current amount of gas consumption, pressure, and the time dependence graph of gas pressure in the vacuum chamber are displayed in the window.
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